• Wide measurement range: 1 x 103 ohm to 1.6 x 1016ohm
• Stable test fixtures: resistivity cell, component test fixture
• High-speed measurement: 10 ms
• Test sequence programming
• Resistivity calculations
• Grounded DUT measurement

Measurement Functions

• Measurement Parameters: R (dc resistance), I (dc current), rs (surface resistivity), rv (volume resistivity)
• Mathematical Functions: Deviation and percent deviation
• Ranging: Auto and manual
• Trigger: Internal, external, manual, and HP-IB
• Delay Time: 0 to 9999 ms in 1 ms steps
• Test Cable Lengths: 2 m maximum
• Measurement Time: Short, medium, and long
• Averaging: 1 to 256
• Test Voltage: 0 to 1000 Vdc, 100 mV steps @ 0 to 200 V, 1 V steps @ 200 to 1000 V
• Maximum Current: 10 mA @ < 100 V, 5 mA @ < 250V, 2 mA @ < 500 V, 1 mA @ < 1 kV
• Current Compliance Setting: 0.5 mA, 1 mA, 2 mA, 5 mA, 10 mA