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Image is for reference only, refer to product info for complete details.
With 0.25 to 10 SLM, 1/4" (6.3 mm) Compression Fitting, this gas mass flow controller is used for process gas flow control and semiconductor processing.
With 0.25 to 10 SLM, 1/4" (6.3 mm) Compression Fitting, this gas mass flow controller is used for process gas flow control and semiconductor processing.
The FMA5400A/5500A Series electronic gas mass flow controllers can control the flow of a wide variety of gases from 10 SCCM up to 100 SLM. Utilizing heat transfer through a heated tube, the FMA5400A/5500A measures gas mass flow rate directly, without needing to compensate for variations in gas temperature or pressure (within stated limits). The FMA5400A/5500A mass flow controllers feature a built-in electromagnetic valve for maintaining a constant flow rate regardless of variations in inlet or outlet pressures.
Features
Applications
| Series | FMA5400A/FMA5500A Series |
| Type | gas mass flow controller |
| Configuration | 0.25 SLM to 10 SLM |
| Configuration | 1/4" (6.3 mm) Compression Fitting |
| Accuracy | For units with full range less than 100 SLM ±1% FS, including linearity over 59 to 77°F (15 to 25°C) and 10 to 60 psia (0.7 to 9.26 lbs (4.2 kg)/cm2). For units ≥ 100 SLM Full Range: ±1.5% FS, including linearity over 59 to 77°F (15 to 25°C) and 10 to 60 psia (0.7 to 9.26 lbs (4.2 kg)/cm2) from 20 to 100% of range; ±3% FS from 0 to 20% of range |
| Repeatability | ±0.5% of full scale |
| Temperature Coefficient | 0.15% FS/°C |
| Pressure Coefficient | 0.01% FS per psi (0.07 bar) |
| Maximum Pressure Drop | 50 psid (3.45 bar) |
| Response Time | 5 seconds to within ±2% of set flow rate over 25 to 100% FS |
| Maximum Gas Pressure | 500 psig (35 kg/cm2 gauge); 1000 psig (70 kg/cm2 gauge) for ranges up to 100 SLPM |
| Gas and Ambient Temperature | 41 to 122°F (5 to 50°C) |
| Leak Integrity | 1 x 10-7 cc/sec of helium maximum to outside environment |
| Materials in Fluid Contact, Aluminum Models | Anodized aluminum, 316 SS, brass and FKM O-rings |
| Materials in Fluid Contact, Stainless Steel Models | 316 SS and FKM O-rings |
| Output Signal | Linear 0 to 5 V DC: 1000 V minimum load; 4 to 20 mA: 50 to 500 V loop resistance, ±20 mV maximum noise |
| Transducer Power | 12 to 15 V DC power @ 800 mA maximum (sizes 43, 44 and 45 ONLY) |
| Turndown Ratio | 1.667361111111111 |
| Power Requirements | 12 to 26 V DC power @ 800 mA maximum |
| Gas Relative Humidity | 0 to 70% RH |
| Flow Range | 10 SCCM up to 100 SLM |
| Compliance | EN55011 class 1, class B; EN50082-1 |
| Altitude Sensitivity | With horizontal flow path, no shift in calibration up to +20 degree pitch |
| Calibration | NIST-traceable; calibrated for nitrogen (other gas calibrations available by special order); done at ambient temperatures only, 68°F (20°C) |
| Fittings | Compression fittings standard; models 5543/5445-class (200/500/1000 SLM) come with 3/4 FNPT connections instead of compression fittings |
| Pressure Drop, Up to 9 SLM | 1.1 psid (0.08 bar) |
| Pressure Drop, 10 to 30 SLM | 3.9 psid (0.27 bar) |
| Pressure Drop, 50 SLM | 8 psid (0.55 bar) |
| Pressure Drop, 60 to 100 SLM | 18.9 psid (1.3 bar) |
| Max Flow Rate Range (To Order) | 10 SCCM, 20 SCCM, 50 SCCM, 100 SCCM, 200 SCCM, 500 SCCM, 1 SLM, 2 SLM, 5 SLM, 10 SLM, 15 SLM, 20 SLM, 30 SLM, 40 SLM, 50 SLM, 60 SLM, 80 SLM, 100 SLM, 200 SLM, 500 SLM, 1000 SLM |
| Shipping Weight | 4 lb (1.8 kg) |
| Series | FMA5400A/FMA5500A Series |
| Type | gas mass flow controller |
| Configuration | 0.25 SLM to 10 SLM |
| Configuration | 1/4" (6.3 mm) Compression Fitting |
| Accuracy | For units with full range less than 100 SLM ±1% FS, including linearity over 59 to 77°F (15 to 25°C) and 10 to 60 psia (0.7 to 9.26 lbs (4.2 kg)/cm2). For units ≥ 100 SLM Full Range: ±1.5% FS, including linearity over 59 to 77°F (15 to 25°C) and 10 to 60 psia (0.7 to 9.26 lbs (4.2 kg)/cm2) from 20 to 100% of range; ±3% FS from 0 to 20% of range |
| Repeatability | ±0.5% of full scale |
| Temperature Coefficient | 0.15% FS/°C |
| Pressure Coefficient | 0.01% FS per psi (0.07 bar) |
| Maximum Pressure Drop | 50 psid (3.45 bar) |
| Response Time | 5 seconds to within ±2% of set flow rate over 25 to 100% FS |
| Maximum Gas Pressure | 500 psig (35 kg/cm2 gauge); 1000 psig (70 kg/cm2 gauge) for ranges up to 100 SLPM |
| Gas and Ambient Temperature | 41 to 122°F (5 to 50°C) |
| Leak Integrity | 1 x 10-7 cc/sec of helium maximum to outside environment |
| Materials in Fluid Contact, Aluminum Models | Anodized aluminum, 316 SS, brass and FKM O-rings |
| Materials in Fluid Contact, Stainless Steel Models | 316 SS and FKM O-rings |
| Output Signal | Linear 0 to 5 V DC: 1000 V minimum load; 4 to 20 mA: 50 to 500 V loop resistance, ±20 mV maximum noise |
| Transducer Power | 12 to 15 V DC power @ 800 mA maximum (sizes 43, 44 and 45 ONLY) |
| Turndown Ratio | 1.667361111111111 |
| Power Requirements | 12 to 26 V DC power @ 800 mA maximum |
| Gas Relative Humidity | 0 to 70% RH |
| Flow Range | 10 SCCM up to 100 SLM |
| Compliance | EN55011 class 1, class B; EN50082-1 |
| Altitude Sensitivity | With horizontal flow path, no shift in calibration up to +20 degree pitch |
| Calibration | NIST-traceable; calibrated for nitrogen (other gas calibrations available by special order); done at ambient temperatures only, 68°F (20°C) |
| Fittings | Compression fittings standard; models 5543/5445-class (200/500/1000 SLM) come with 3/4 FNPT connections instead of compression fittings |
| Pressure Drop, Up to 9 SLM | 1.1 psid (0.08 bar) |
| Pressure Drop, 10 to 30 SLM | 3.9 psid (0.27 bar) |
| Pressure Drop, 50 SLM | 8 psid (0.55 bar) |
| Pressure Drop, 60 to 100 SLM | 18.9 psid (1.3 bar) |
| Max Flow Rate Range (To Order) | 10 SCCM, 20 SCCM, 50 SCCM, 100 SCCM, 200 SCCM, 500 SCCM, 1 SLM, 2 SLM, 5 SLM, 10 SLM, 15 SLM, 20 SLM, 30 SLM, 40 SLM, 50 SLM, 60 SLM, 80 SLM, 100 SLM, 200 SLM, 500 SLM, 1000 SLM |
| Shipping Weight | 4 lb (1.8 kg) |
